High Resolution Industrial CT System for Fine Parts Inspection

The YXLON FF20 CT computed tomography system is designed to achieve the best 3D inspection results at very high resolution. Whether for R&D, defect analysis, process monitoring, or CT metrology, the FF20 CT is ideally suited for inspection of a variety of very small components from the electronics and material science industries.
  • 2D detail visibility of up to 150 nm with new water-cooled 190 kV transmission tube 
  • Temperature stability with granite-based manipulation
  • Innovative touchscreen for intuitive operation via graphical symbols
  • Application flexibility using trajectories such as helical CT scan, horizontal field-of-view extension, virtual rotation axis, and standard Quick/QualityScan
  • Precise metrology MPESD = 3,9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3

System Capabilities

The FF20 CT is a compact, high-resolution computed tomography system, perfectly suited for inspection of your small items such as:
  • Electronic components like SMD
  • Semiconductor packaging
  • Probes of new materials (e.g. metal, plastics, CFRP)
  • Microsystems, MEMS, MOEMS
  • Medical devices like e.g. cannulas
Based on a new, innovative operation concept, the FF20 CT has been designed for low temperature expansion and precise inspection item manipulation with high repeatability and measurement capability.

The 190 kV transmission X-ray tube is newly developed and achieves a detail visibility in radioscopy of up to 150 nm. With a focus on usability, system control is accomplished via two touchscreens displaying easy to understand graphics. Intelligent functionality supports the user: As an example, ‘IntelliGuard’ avoids collision with X-ray tube and detector by automatically determining the outer shape of the inspection item during a 360° rotation.

CT trajectories such as ‘HeliExtend’ (helical CT scan and reconstruction method) provide consistently good image quality from top to bottom, and capture elongated specimens with a high magnification scan.

The ability to select your own center of scan rotation using a ‘virtual rotation axis’ (FlexCenter) offers considerable comfort and saves time. The inspected item need not be repositioned if regions of interest fall outside the physical center of rotation.

A system health monitor gives you information on various parameters. Results are consolidated and displayed in a ‘traffic light’ representation. Additionally, you can access this health status and the progress of CT (and reconstruction) from your office through the remote monitoring feature.

Technical Data

                                                Attribute                                                                                                 Respective Value                                                 
                                                Sample Diameter                                                                                                 280 [mm] (11.02")                                                 
                                                Sample Height                                                                                                 700 [mm] (27.6")                                                 
                                                Maximum Sample Weight                                                                                                 17 [kg]                                                 
                                                System Dimension                                                                                                 2380 x 945 x 2180 [mm]                                                 
                                                X-ray Tube                                                                                                 Y.FXT 190.61 transmission tube                                                 
                                                CT Modes                                                                                                 QuickScan®, QualityScan, Cone-beam CT, Helical CT, virtual rotation axis, FoV extensions, Volume Crop                                                 
                                                Manipulation                                                                                                 granite-based, active air damping, 6 axes, wide FDD range

131, U-Tower, 120 Heungdeokjungang-ro, Giheung-gu, Yongin-si, Gyeonggi-do, 16950 Korea