NanoLab

YXLON FF20 CT

High Resolution Industrial CT System for Fine Parts Inspection

The YXLON FF20 CT computed tomography system is designed to achieve the best 3D inspection results at very high resolution. Whether for R&D, defect analysis, process monitoring, or CT metrology, the FF20 CT is ideally suited for inspection of a variety of very small components from the electronics and material science industries.

2D detail visibility of up to 150 nm with new water-cooled 190 kV transmission tube
Temperature stability with granite-based manipulation
Innovative touchscreen for intuitive operation via graphical symbols
Application flexibility using trajectories such as helical CT scan, horizontal field-of-view extension, virtual rotation axis, and standard Quick/QualityScan
Precise metrology MPE_SD = 3,9 µm + L/75, measured as a deviation of sphere distance referring to VDI 2630-1.3

System Capabilities

The FF20 CT is a compact, high-resolution computed tomography system, perfectly suited for inspection of your small items such as:

Electronic components like SMD
Semiconductor packaging
Probes of new materials (e.g. metal, plastics, CFRP)
Microsystems, MEMS, MOEMS
Medical devices like e.g. cannulas

Based on a new, innovative operation concept, the FF20 CT has been designed for low temperature expansion and precise inspection item manipulation with high repeatability and measurement capability.

The 190 kV transmission X-ray tube is newly developed and achieves a detail visibility in radioscopy of up to 150 nm. With a focus on usability, system control is accomplished via two touchscreens displaying easy to understand graphics. Intelligent functionality supports the user: As an example, ‘IntelliGuard’ avoids collision with X-ray tube and detector by automatically determining the outer shape of the inspection item during a 360° rotation.

CT trajectories such as ‘HeliExtend’ (helical CT scan and reconstruction method) provide consistently good image quality from top to bottom, and capture elongated specimens with a high magnification scan.

The ability to select your own center of scan rotation using a ‘virtual rotation axis’ (FlexCenter) offers considerable comfort and saves time. The inspected item need not be repositioned if regions of interest fall outside the physical center of rotation.

A system health monitor gives you information on various parameters. Results are consolidated and displayed in a ‘traffic light’ representation. Additionally, you can access this health status and the progress of CT (and reconstruction) from your office through the remote monitoring feature.

Technical Data

Attribute	Respective Value
Sample Diameter	280 [mm] (11.02")
Sample Height	700 [mm] (27.6")
Maximum Sample Weight	17 [kg]
System Dimension	2380 x 945 x 2180 [mm]
X-ray Tube	Y.FXT 190.61 transmission tube
CT Modes	QuickScan®, QualityScan, Cone-beam CT, Helical CT, virtual rotation axis, FoV extensions, Volume Crop
Manipulation	granite-based, active air damping, 6 axes, wide FDD range